JPH0267182U - - Google Patents
Info
- Publication number
- JPH0267182U JPH0267182U JP14675088U JP14675088U JPH0267182U JP H0267182 U JPH0267182 U JP H0267182U JP 14675088 U JP14675088 U JP 14675088U JP 14675088 U JP14675088 U JP 14675088U JP H0267182 U JPH0267182 U JP H0267182U
- Authority
- JP
- Japan
- Prior art keywords
- piston
- cylinder
- valve
- valve body
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988146750U JPH0542307Y2 (en]) | 1988-11-10 | 1988-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988146750U JPH0542307Y2 (en]) | 1988-11-10 | 1988-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0267182U true JPH0267182U (en]) | 1990-05-21 |
| JPH0542307Y2 JPH0542307Y2 (en]) | 1993-10-25 |
Family
ID=31416530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988146750U Expired - Lifetime JPH0542307Y2 (en]) | 1988-11-10 | 1988-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542307Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123980U (ja) * | 1982-02-17 | 1983-08-23 | 株式会社日立製作所 | ストツプバルブ |
| JPS6124584U (ja) * | 1984-07-20 | 1986-02-13 | 大亜真空株式会社 | コンパクトバルブ |
-
1988
- 1988-11-10 JP JP1988146750U patent/JPH0542307Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123980U (ja) * | 1982-02-17 | 1983-08-23 | 株式会社日立製作所 | ストツプバルブ |
| JPS6124584U (ja) * | 1984-07-20 | 1986-02-13 | 大亜真空株式会社 | コンパクトバルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542307Y2 (en]) | 1993-10-25 |